SemiStory Equipment List _ 23.03.28

NO

Asset NO

EQUIPMENT

MODEL

MAKER

Q'ty

Remark

1

161150001

Plasma Cleaner

JSPES-W21

JESAGI

1

Photo

2

161190002

Plasma Cleaner

JSPCS-750

JESAGI

1

Photo

3

199190001

MOCVD

AIX200/4RFS(2"x3)

AIXTRON

1

Photo

4

121210001

Gas Analyzer

HALO+

Tera Tech

1

Photo

5

121210005

Clean Air (Moving Scrubber)

New Tech Wave

NTW-MSE2000S(B)

1

Photo

6

151180002

PECVD

PECVD System

1

Photo

7

199200002

PECVD

NGP-1000

Oxford

1

Photo

8

111190001

Sputter

ENTRON

ULVAC

1

Photo

9

121210006

Ion Sputter&Coater

108Auto

Cressington

1

Photo

10

121210007

E-beam

Resolution

Cha Industries

1

Photo

11

199190005

RTA

RTA150H-AVP1

NewYoung Mtech

1

Photo

12

121210067

RTP

YIT-6032

YEST

1

Photo

13

121180110

ICP Etcher

TENACIER-400VE

SUNIC

1

Photo

14

199180022

ICP Etcher

300L

Maxis

1

Photo

15

121210068

ICP Etcher

TE3100

Tainics

1

Photo

16

199180018

ICP Etcher

TE3100

Tainics

1

Photo

17

121210069

ICP Etcher

Plasmalab100-ICP380

Oxford

1

Photo

18

121210070

ICP Etcher

LX-380

Top Eng

1

Photo

19

124180001

XeF2 Etcher

Genius 1125

Boundless system

1

Photo

20

199180028

Track

MEG8-CD

GMT

1

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