SemiStory Equipment List (23.04.10)
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SemiStory Equipment List _ 23.04.10 | |||||||
NO | Asset NO | EQUIPMENT | MODEL | MAKER | Q'ty | Remark | |
1 | 161150001 | Plasma Cleaner | JSPES-W21 | JESAGI | 1 | Photo | |
| 2 | 161190002 | Plasma Cleaner | JSPCS-750 | JESAGI | 1 | Photo | |
| 3 | 199190001 | MOCVD | AIX200/4RFS(2"x3) | AIXTRON | 1 | Photo | |
| 4 | 121210001 | Gas Analyzer | HALO+ | Tera Tech | 1 | Photo | |
| 5 | 121210005 | Clean Air (Moving Scrubber) | New Tech Wave | NTW-MSE2000S(B) | 1 | Photo | |
| 6 | 151180002 | PECVD | PECVD System | 1 | Photo | ||
| 7 | 199200002 | PECVD | NGP-1000 | Oxford | 1 | Photo | |
| 8 | 111190001 | Sputter | ENTRON | ULVAC | 1 | Photo | |
| 9 | 121210006 | Ion Sputter&Coater | 108Auto | Cressington | 1 | Photo | |
| 10 | 121210007 | E-beam | Resolution | Cha Industries | 1 | Photo | |
| 11 | 199190005 | RTA | RTA150H-AVP1 | NewYoung Mtech | 1 | Photo | |
| 12 | 121210067 | RTP | YIT-6032 | YEST | 1 | Photo | |
| 13 | 121180110 | ICP Etcher | TENACIER-400VE | SUNIC | 1 | Photo | |
| 14 | 199180022 | ICP Etcher | 300L | Maxis | 1 | Photo | |
| 15 | 121210068 | ICP Etcher | TE3100 | Tainics | 1 | Photo | |
| 16 | 199180018 | ICP Etcher | TE3100 | Tainics | 1 | Photo | |
| 17 | 121210069 | ICP Etcher | Plasmalab100-ICP380 | Oxford | 1 | Photo | |
| 18 | 121210070 | ICP Etcher | LX-380 | Top Eng | 1 | Photo | |
| 19 | 124180001 | XeF2 Etcher | Genius 1125 | Boundless system | 1 | Photo | |
| 20 | 199180028 | Track | MEG8-CD | GMT | 1 | Photo | |
| 21 | 199180029 | Track | WD-030130-VM | TES | 1 | Photo | |
| 22 | 121210072 | Track | Renaissance-26 | US Tech | 1 | Photo | |
| 23 | 161180006 | Wet Station | Manual Wet Station | 1 | Photo | ||
| 24 | 121210073 | Laser Lift Off (LLO) | SS-3041GH6-AL02 | SEISHIN | 1 | Photo | |
| 25 | 199210006 | Laser Marking System | HEU-1005 | Hankwang | 1 | Photo | |
| 26 | 121210075 | Grinding&Lapping | BPG320/G2LP | NTS | 1 | Photo | |
| 27 | 161160003 | Expander | CSE-W220 | CS Eng | 1 | Photo | |
| 28 | 122200001 | Laminating M/C | Tablet-BS4830 | LG | 1 | Photo | |
| 29 | 112180003 | Shaking Incubator | 600795 | Bioneer | 2 | Photo | |
| 30 | 112170004 | 3D AOI Inspection | KY-7100 | KOH YOUNG | 1 | Photo | |
| 31 | 199180007 | Highly Accelerated Stress Test Chamber | PM-420 | ETAC | 1 | Photo | |
| 32 | 121210012 | Thermal Shock Chamber | TSA-41L-A | ESPEC | 1 | Photo | |
| 33 | 121210013 | Thermal Shock Chamber | TSA-71S-W | ESPEC | 1 | Photo | |
| 34 | 121210014 | Temp&Humid Chamber | PV-221 | ESPEC | 1 | Photo | |
| 35 | 121210016 | Temp&Humid Chamber | PL-3KPH | ESPEC | 1 | Photo | |
| 36 | 121210018 | Temp&Humid Chamber | PH-4KT | ESPEC | 2 | Photo | |
| 37 | 121210019 | Temp&Humid Chamber | PR-4KTH | ESPEC | 1 | Photo | |
| 38 | 161180005 | Temp&Humid Chamber | 1500 x 1000 x 1000 | New Tech Korea | 1 |
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