SemiStory Equipment List (23.07.10)
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SemiStory Equipment List _ 23.07.10
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NO |
Asset NO |
EQUIPMENT |
MODEL |
MAKER |
Q'ty |
Remark | |
|
1 |
161150001 | Plasma Cleaner | JSPES-W21 | JESAGI | 1 | Photo | |
| 2 | 161190002 | Plasma Cleaner | JSPCS-750 | JESAGI | 1 | Photo | |
| 3 | 199190001 | MOCVD | AIX200/4RFS(2"x3) | AIXTRON | 1 | Photo | |
| 4 | 121210001 | Gas Analyzer | HALO+ | Tera Tech | 1 | Photo | |
| 5 | 121210005 | Clean Air (Moving Scrubber) | New Tech Wave | NTW-MSE2000S(B) | 1 | Photo | |
| 6 | 151180002 | PECVD | PECVD System | 1 | Photo | ||
| 7 | 111190001 | Sputter | ENTRON | ULVAC | 1 | Photo | |
| 9 | 121210006 | Ion Sputter&Coater | 108Auto | Cressington | 1 | Photo | |
| 10 | 121210007 | E-beam | Resolution | Cha Industries | 1 | Photo | |
| 11 | 121210008 | E-beam | Resolution | Cha Industries | 1 | Photo | |
| 12 | 121210009 | E-beam | Resolution | Cha Industries | 1 | Photo | |
| 13 | 121210067 | RTP | YIT-6032 | YEST | 1 | Photo | |
| 14 | 121180110 | ICP Etcher | TENACIER-400VE | SUNIC | 1 | Photo | |
| 15 | 199180022 | ICP Etcher | 300L | Maxis | 1 | Photo | |
| 16 | 121210068 | ICP Etcher | TE3100 | Tainics | 1 | Photo | |
| 17 | 199180018 | ICP Etcher | TE3100 | Tainics | 1 | Photo | |
| 18 | 121210069 | ICP Etcher | Plasmalab100-ICP380 | Oxford | 1 | Photo | |
| 19 | 121210070 | ICP Etcher | LX-380 | Top Eng | 1 | Photo | |
| 20 | 124180001 | XeF2 Etcher | Genius 1125 | Boundless system | 1 | Photo | |
| 21 | 199180028 | Track | MEG8-CD | GMT | 1 | Photo | |
| 22 | 199180029 | Track | WD-030130-VM | TES | 1 | Photo | |
| 23 | 121210072 | Track | Renaissance-26 | US Tech | 1 | Photo | |
| 24 | 199210006 | Laser Marking System | HEU-1005 | Hankwang | 1 | Photo | |
| 25 | 121210075 | Grinding&Lapping | BPG320/G2LP | NTS | 1 | Photo | |
| 26 | 161160003 | Expander | CSE-W220 | CS Eng | 1 | Photo | |
| 27 | 122200001 | Laminating M/C | Tablet-BS4830 | LG | 1 | Photo | |
| 28 | 112180003 | Shaking Incubator | 600795 | Bioneer | 2 | Photo | |
| 29 | 112170004 | 3D AOI Inspection | KY-7100 | KOH YOUNG | 1 | Photo | |
| 30 | 121210012 | Thermal Shock Chamber | TSA-41L-A | ESPEC |
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