| ID | 115240001 |
|---|---|
| Description | Wafer 50-200, 100-300mm |
| Manufacturer | EVG |
| Model | EVG810LT |
| Vintage | 2009 |
| Serial No. | S090007 |
| Quantity | 1 |
| Condition | Working |
| Equipment Detail |
Low Temp Plasma Activation System |
Main text
Attachments
- EVG810_manual.pdf (695.9K) 6downloads | DATE : 2025-03-26 13:49:53
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