✓ Maker------------- ULVAC 

✓ Model------------- Enviro II 

✓ Wafer size------- currently 6 inch 

✓ Gas Lines------- N2, O2, CF4, H2N2(5%) 

✓ Process---------- Microwave ashing 

✓ Ashing rate----- 200Å ~ 500㎛ 

✓ Application 

   . PR Descum 

   . Thick PR or Polymer Removal 

   . Final Wafer Cleanin